Low-Power, High-Performance MEMS-based Switch Fabric

Presenter: Paul D. Franzon
Co-PIs: Wentai Liu, Michael Steer
GRAs: Bruce Duewer, David Winick, John Wilson, Umut Eksi, John Tucker, Som Paudchury
Department of Electrical and Computer Engineering
North Carolina State University
(919) 515 7351
paulf@ncsu.edu
and in collaboration with MCNC

Objectives

Also investigate RF and analog applications of technology.

Contactless switch technology based on the Capacitive MEMS Switch

Pulse Signaling

Switch Fabrication

Capacitive MEMS Switch

4*4 Switch architecture
4*4 Switch architecture


Schematic of one switch
Schematic of one switch


SEM photo of piston array
SEM photo of piston array

Potential Applications

Conclusions