Experimental Determination of On-Chip Interconnect Capacitances

In this report we present a novel method for the measurement of interconnect capacitance, atomic capacitance microsopy. We also present VLSI structures which allow correlation of ACM and traditional (VNA, TDR, direct capacitance) measurement techniques.

NOTE: This final version replaces April 1995 & June 1995 releases.

WARNING: Large file (approx 3 MB).

Michael B. Steer, Paul D. Franzon, Alan W. Glaser, Phil Russell, Gordon Shedd