Low-Power, High-Performance MEMS-based Switch Fabric

Outline

• Program Objectives
• Technical Approach
• Pulse Signalling
• Programmable MEMS Capacitor Array
• Potential Applications
• Conclusions

• Produce a High Bandwidth Reconfigurable Switch Technology
• Sustained data rates >> 1 Gbps
• Low power to reconfigure
  • Goal: One-quarter of equivalent CMOS
• Low power to transmit data
  • Goal: One-quarter of equivalent CMOS switch
• Reconfiguration rate O(100 ns)
• Cheaper than CMOS (about $10/cm^2)
• Dense -- Goal: 192*192 switch

• MEMS = MicroElectroMechanical Systems (`micromachines')
• Transmit signals as pulses
• Build switches out of series capacitors
  • `Up' = low capacitance, Switch open
  • `Down' = high capacitance, Switch closed.
• Reconfigure switch array electrostatically
• Flip-mount (or edge mount) Switches to CMOS

Pulse Signalling

• Encode data as a pulse train, rather than edges.
• Advantages
  • Don't need contacting switches -- 0.1 pF series capacitor passes signals.
  • Reduces power at high data rates.
  • Reduces noise levels
• Disadvantages
  • More complex receiver and synchronization
  • Need to characterize signal itegrity and robustness

Schematic of one switch

SEM photo of piston array

• Configurable Computing
• Programmable Interconnect
• System network routers/switches
• Video-On-Demand
• Analog/RF version): Low-cost components

• Capacitive MEMS switches show potential for delivering low-power, high-bandwidth reconfigurable interconnect structures.
• Main technical innovations:
  • Pulse signalling.
  • Dense addressable piston (capacitor) array
• Potential to serve as an RF component too for beam steering, etc.
• Status:
  • Funded by DARPA and NSF