Levered Switches
The levered mechanical switches create a mechanical connection via a
500um electrostatically actuated lever arm, intended to reduce actuation
voltage. On the chip are 4 different configurations, for testing 3
different polysilicon spring structures and 2 methods of electrical
contact.
The rotating switches are single- and two-way switches based on the
micro-motor design. A contact arm in each is actuated either electro-
statically or electromagnetically.
Scraping switches provide a less resistive mechanical metal-metal
connection. A scraping motion is made when moving the switches in and
out of contact in order to remove oxides that may have built up. All
of these on-of switches can be actuated electrostatically or
electromagnetically, by application of voltage or current to the
appropriately connected pads.
